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Electroceramic- based mems: fabrication-technology and applications

Setter Nava Ed.

Electroceramic- based mems: fabrication-technology and applications Setter Nava Ed. - New York Springer 2005 - xii,414p. cm. - Electronic materials: science and technology .

Includes bibliographical references; Index 411-414p

ISBN: 0387233105 (hbd) Rs.6493.65

Standard No.: 77743

Source: 313, 08/03/2007, Ashutosh Technical Books Textbook

Subjects--Topical Terms:
Microelectromechanical systems
Physics

Dewey Class. No.: D65,3, P5 Carpa

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