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Electroceramic- based mems: fabrication-technology and applications Setter Nava Ed.

By: Material type: TextTextLanguage: English Series: Electronic materials: science and technologyPublication details: New York Springer 2005Description: xii,414p. cmISBN:
  • 0387233105 (hbd)
Subject(s): DDC classification:
  • D65,3, P5 Carpa
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