TY  - BOOK
AU  - Depla D Ed.
AU  -  Mahieu S Ed.
TI  - Reactive sputter deposition:  Mahieu S Ed.    
T2  - Springer series in materials science, 109
SN  - 9783540766629 (hbd)
U1  - C211, P8   Carpa 
PY  - 2008///
CY  - Berlin
PB  - Springer          
KW  -  Chemical engineering
KW  -  Condensed matter physics
KW  -  Industrial chemsitry
KW  -  Organic Chemistry
KW  - Physics
N1  - Includes bibliographical references.; Index 561-570p
ER  -