TY  - BOOK
AU  - Taniguchi Norio Ed.
TI  - Nanotechnology:integrated processing systems for ultra-precision and ultra-fine products
SN  - 0195693272 (pbk)
U1  - C21:(D), P3   Carpa 
PY  - 2003///
CY  - Oxford
PB  - Oxford University Press        
KW  -  Nanotechnology
KW  - Physics
N1  - Includes bibliographical references.; Index 403-406p
ER  -