Setter Nava Ed. <br/><br/>
Electroceramic- based mems: fabrication-technology and applications 
Setter Nava Ed. 
 - New  York Springer           2005 
 - xii,414p.  cm. 
 - Electronic materials: science and technology .
<br/><br/> Includes bibliographical references; Index 411-414p 
<br/><br/><label>ISBN: </label>0387233105 (hbd)  Rs.6493.65 
<br/><br/><label>Standard No.: </label>77743 
<br/><br/><label>Source: </label> 313, 08/03/2007, Ashutosh Technical Books  Textbook 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Microelectromechanical systems<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>D65,3, P5   Carpa