TY  - BOOK
AU  - Setter Nava Ed.
TI  - Electroceramic- based mems: fabrication-technology and applications
T2  - Electronic materials: science and technology
SN  - 0387233105 (hbd)
U1  - D65,3, P5   Carpa 
PY  - 2005///
CY  - New
PB  - York Springer         
KW  -  Microelectromechanical systems
KW  - Physics
N1  - Includes bibliographical references; Index 411-414p
ER  -