Hilleringmann Ulrich <br/><br/>
Silicon semiconductor technology: Processing and integration of microelectronic devices 

 - Wiesbaden   Springer  2023 
 - xi,264p. 
<br/><br/><label>ISBN: </label>9783658410407 
<br/><br/><label>Source: </label>TB 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic Science