Semiconductor devices : Physics and technology
/ by S. M. Sze
- 2nd ed.
- New Delhi: Wiley India, 2002
- viii, 564p.
Appendices A-L 531-550p.; Index 551-564p.
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices
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Textual
Devices Physics Semiconductor Devices General Science