TY  - BOOK
AU  - Tilli, Markku
TI  - Handbook of Silicon Based MEMS Materials and Technologies, 3ed
SN  - 9780128177860
PY  - 2020///
CY  - Elsevier
PB  - Elsevier
UR  - https://www.sciencedirect.com/science/book/9780128177860
ER  -