TY  - BOOK
AU  - Lau Wai Shnig
TI  - Ulsi Front-End Technology: Covering from the First Semiconductor Paper to Cmos Finfet Technology
SN  - 9789813222168
PB  - World Scientific
KW  - Materials Science
UR  - https://www.worldscientific.com/worldscibooks/10.1142/10495#t=toc
ER  -