TY  - BOOK
AU  - Frangi Attilio Et Al
TI  - Advances in Multiphysics Simulation and Experimental Testing of Mems
SN  - 9781860948633
PB  - ICP
KW  - Nanotechnology & Nanoscience
UR  - https://www.worldscientific.com/worldscibooks/10.1142/p522#t=toc
ER  -