Cheung Rebecca <br/><br/>
Silicon Carbide Microelectromechanical Systems for Harsh Environments 

 -  ICP  World Scientific  2006 
<br/><br/><label>ISBN: </label>9781860949098 
<br/><br/><label>Source: </label>EBOOK 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology & Nanoscience