TY  - BOOK
AU  - Cheung Rebecca
TI  - Silicon Carbide Microelectromechanical Systems for Harsh Environments
SN  - 9781860949098
PB  - ICP
KW  - Nanotechnology & Nanoscience
UR  - https://www.worldscientific.com/worldscibooks/10.1142/p426#t=toc
ER  -