TY  - BOOK
AU  - Karpuzov D S Et Al
TI  - Ion Implantation and Ion Beam Equipmen - Proceedings of the International Conference
SN  - 9789814539265
PB  - World Scientific
KW  - Physics
UR  - https://www.worldscientific.com/worldscibooks/10.1142/1327#t=toc
ER  -