TY  - BOOK
AU  - Craievich Aldo Et Al
TI  - Microlithography: High Integration in Microelectronics - Proceedings of the First Workshop
SN  - 9789814540698
PB  - World Scientific
KW  - Physics
UR  - https://www.worldscientific.com/worldscibooks/10.1142/1034#t=toc
ER  -