TY  - BOOK
AU  - Lin Yuan
AU  -  Chen Xin
TI  - Advanced nano deposition methods
SN  - 9783527340255 (hbk)
U1  - C21:(D), Q6 
PY  - 2016///
CY  - Germany
PB  - Wiley       
KW  -  Direct-writing nanloithography
KW  -  Electron beam evaporation deposition
KW  -  Nanostructures and thin films deposited with sputtering
KW  -  Nanosturctured thin film solid oxide fuel cells
KW  - Physics
N1  - Index 305-309p
ER  -