00594nam a2200217Ia 450000500170000000800460001702000180006303700100008104000080009104000080009904000080010704100080011504100080012308400080013110001110013924500190025026000230026926000090029265000220030185600530032320260121161436.0008  260114s9999    xx            000 0 eng d  a9780429076749  aEBOOK  aCRL  beng  cCRL  2eng  aeng  qCRL  aHandbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon 0aKrishna Seshan  bTaylor and Francis  c2002  aMaterials Science  uhttp://www.taylorfrancis.com/books/9780429076749