TY  - BOOK
AU  - María Ángela Pampillón Arce
TI  - Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
SN  - 9783319666075
PB  - Springer
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-319-66607-5
ER  -