00583nam a2200241Ia 450000500170000000800460001702000180006303700100008104000080009104000080009904000080010704100080011504100080012308400080013110000160013924500460015524500420020126000230024326000090026636500050027536500080028085600530028820260324120350.0008  260324s9999    xx            000 0 eng d  a9780429194573  aEBOOK  aCRL  beng  cCRL  2eng  aeng  qCRL  aIsao Yamada 0aMaterials Processing by Cluster Ion Beams 0bHistory, Technology, and Applications  bTaylor and Francis  c2015  a  b340  uhttp://www.taylorfrancis.com/books/9780429194573