Doering Robert Ed. <br/><br/>
Handbook of semiconductor manufacturing technology 
by Doering Robert Ed.; Nishi Yoshio Ed. 
 - 2 
 - Boca Raton   CRC Pres       2008 
 - Various pagination  cm. 
<br/><br/> Includes bibliographical references.; Appendix A-D, A1-D8p.; Index I1-I26p. 
<br/><br/><label>ISBN: </label>9781574446753 (hbd) 
<br/><br/><label>Standard No.: </label>82203 
<br/><br/><label>Source: </label> 230, 21/10/2008, Ashutosh Technical Books  REF 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Semiconductor industry<br/> Semiconductors-design<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C6:212:(F)g, P8   RR