TY  - BOOK
AU  - Doering Robert Ed.
AU  -  Nishi Yoshio Ed.
TI  - Handbook of semiconductor manufacturing technology
SN  - 9781574446753 (hbd)
U1  - C6:212:(F)g, P8   RR 
PY  - 2008///
CY  - Boca Raton 
PB  - CRC Pres     
KW  -  Semiconductor industry
KW  -  Semiconductors-design
KW  - Physics
N1  - Includes bibliographical references.; Appendix A-D, A1-D8p.; Index I1-I26p
ER  -