TY  - BOOK
AU  - Crowder Billy L Ed.
ED  - Inetrnational conference on ion implantation in semiconductors and other materials (1972 : New York)
TI  - Proceeding on Ion implantation in semiconductors and other materials
T2  - IBM research symposium series
U1  - C6:212p1,N72, L3 
PY  - 1973///
CY  - New York 
PB  - Plenum Press     
KW  - Semiconductor
ER  -