May Gary S <br/><br/>
Fundamentals of semiconductor fabrication 
by May Gary S; Sze Simon M 
 - New Jersey   John Wiley & Sons, Inc,  2004 
 - xiii, 305p.  cm. 
<br/><br/> Includes bibliographical references.; Appendix A-L, 265-296p.; Index 297-305p. 
<br/><br/><label>ISBN: </label>981253072X (pbk) 
<br/><br/><label>Standard No.: </label>76213 
<br/><br/><label>Source: </label> 1714, 20/02/2007, Unilib Book Distributors  Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Semiconductor fabrication<br/> Semiconductor physics<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C6:212, P4;1-;2