TY  - BOOK
AU  - May Gary S
AU  -  Sze Simon M
TI  - Fundamentals of semiconductor fabrication
SN  - 981253072X (pbk)
U1  - C6:212, P4;1-;2 
PY  - 2004///
CY  - New Jersey 
PB  - John Wiley & Sons, Inc
KW  -  Semiconductor fabrication
KW  -  Semiconductor physics
KW  - Physics
N1  - Includes bibliographical references.; Appendix A-L, 265-296p.; Index 297-305p
ER  -