Chernow Fred Ed. <br/><br/>
Proceeding on Ion implantation in semiconductors 
by Chernow Fred Ed.; Borders James A Ed. 
 - New York   Plenum Press       1977 
 - xiv,754p.  cm. 
<br/><br/><label>Standard No.: </label>75621 
<br/><br/><label>Source: </label> Textbook 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors
<br/><br/><label>Dewey Class. No.: </label>C6:212p1,N76, L7