TY  - BOOK
AU  - Chernow Fred Ed.
AU  -  Borders James A Ed.
ED  - International conference on ion implantation in semiconductors (1976 : Boulder)
TI  - Proceeding on Ion implantation in semiconductors
U1  - C6:212p1,N76, L7 
PY  - 1977///
CY  - New York 
PB  - Plenum Press     
KW  - Semiconductors
ER  -