TY  - BOOK
AU  - Gardner Julian W
AU  -  Awadelkarim Osama O
AU  -  Varadan Vijay K
TI  - Microsensors, MEMS, and smart devices
SN  - 047186109X (hbd)
U1  - D65,3, P1-;1 
PY  - 2001///
CY  - Chichester John Wiley & Sons,Ltd
KW  -  Detectors
KW  -  Electronic materials
KW  -  Intelligent control systems
KW  -  Microelectromechanical systems
KW  - Computer science
N1  - Includes bibliographical references.; Appendix A-M, 445-491p.; Index 493-503p
ER  -