TY  - BOOK
AU  - Mahalik N P Ed.
TI  - Micromanufacturing and nanotechnology
SN  - 9788181285058 (hbd)
U1  - C21:(D), P6   TC 
PY  - 2006///
CY  - Berlin
PB  - Springer       
KW  - Physics
N1  - Includes bibliographical references.; Index 463-468p
ER  -