TY  - BOOK
AU  - Lieberman Michael A
AU  -  Lichtenberg Allan J
TI  - Principles of plasma discharges and materials processing
SN  - 0471005770 (hbd)
U1  - C9B58, N4 
PY  - 1994///
CY  - New York John Wiley Sons, Inc.
KW  -  Plasma
KW  - Physics
N1  - Appendix A-C, 541-558p; Index 559-572p; ^n23/CSL/C/2002-2003/323^d2002-09-10^mPurchase
ER  -