TY  - BOOK
AU  - Freund L B
AU  -  Suresh S
TI  - Thin film materials: stress, defect, formation and surface evolution
SN  - 0521822815
U1  - C6:212;197, P3    TC 
PY  - 2003///
CY  - Cambridge
PB  - Cambridge University Press       
KW  -  Physics
KW  - Thin Films
N1  -  Bibliographical References713-737p
ER  -