Shul R J Ed <br/><br/>
Handbook of advanced plasma processing techniques ed by R J Shul and S J Pearton 
Shul R J Ed; Pearton S J Ed 
 - Berlin  Springer-Verlag           2000 
 - xvi,653p 
<br/><br/> Includes bibliographical references; Index 649-653p; ^n23/CSL/C/00-01/OTSG/539^d2001-01-30^mPurchase 
<br/><br/><label>ISBN: </label>3540667725 (hbd) 
<br/><br/><label>Standard No.: </label>7329 
<br/><br/><label>Source: </label> Shankar,  Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Plasma engineering<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C9B581, P0