Handbook of advanced plasma processing techniques ed by R J Shul and S J Pearton - Shul R J Ed; Pearton S J Ed (Berlin Springer-Verlag, 2000)
Includes bibliographical references; Index 649-653p; ^n23/CSL/C/00-01/OTSG/539^d2001-01-30^mPurchase
Keywords: Plasma engineering; Physics