TY  - BOOK
AU  - Shul R J Ed
AU  -  Pearton S J Ed
TI  - Handbook of advanced plasma processing techniques ed by R J Shul and S J Pearton
SN  - 3540667725 (hbd)
U1  - C9B581, P0 
PY  - 2000///
CY  - Berlin
PB  - Springer-Verlag         
KW  -  Plasma engineering
KW  - Physics
N1  - Includes bibliographical references; Index 649-653p; ^n23/CSL/C/00-01/OTSG/539^d2001-01-30^mPurchase
ER  -