TY  - BOOK
AU  - Dearnaley G
AU  -  Freeman J H
AU  -  Nelson R S
AU  -  Stephen J
TI  - Ion implantation
T2  - Series defects in crystal in solids
U1  - C9B58, L3 
PY  - 1973///
CY  - London
PB  - North-Holland Publishing        
KW  -  Ion
KW  - Plasma physics
ER  -