TY  - BOOK
AU  - Hubler G K Ed.
AU  -  Holland O W Ed.
ED  - Symposium on Ion implantation and ion beam processing of materials (1984 : Boston)
TI  - Proceeding on Ion implantation and ion beam processing of materials
T2  - Materials research society symposia proceedings; 27
U1  - C13p1,N83, M4 
PY  - 1984///
CY  - New York    
PB  -  North Holland       
KW  -  Matter
KW  - Physics
ER  -