TY  - BOOK
AU  - Mayer James W
AU  -  Davies J A
AU  -  Eriksson L
TI  - Ion implantation in semiconductors: silicon and germanium
U1  - D65,4,T, L0 
PY  - 1970///
CY  - New York    
PB  -  Academic Press       
N1  - Appendix A.1-A.4, 250254p
ER  -