Fujita H Ed. <br/><br/>
Micromachines as tools for nanotechnology 
Fujita H Ed. 
 - Barlin  Springer-Verlag           2003 
 - xii, 211p.  cm. 
 - Microtechnology and mems .
<br/><br/> Includes bibliographical references 
<br/><br/><label>ISBN: </label>8181282027 (pbk) 
<br/><br/><label>Standard No.: </label>13160 
<br/><br/><label>Source: </label> 714, 22/12/2004, Unilib Book Distributors  Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Computer Science<br/> Matter<br/> Solid<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C21:(D), P3