TY  - BOOK
AU  - Fujita H Ed.
TI  - Micromachines as tools for nanotechnology
T2  - Microtechnology and mems
SN  - 8181282027 (pbk)
U1  - C21:(D), P3 
PY  - 2003///
CY  - Barlin
PB  - Springer-Verlag         
KW  -  Computer Science
KW  -  Matter
KW  -  Solid
KW  - Physics
N1  - Includes bibliographical references
ER  -