Baltes H <br/><br/>
Enabling technology for MEMS and Nanodevices. 
Baltes H; Brand O Ed. 
 - Weinham  Wiley         2013 
 - xii,427p  cm. 
<br/><br/><label>ISBN: </label> 5954.6000000000004 
<br/><br/><label>Standard No.: </label>119715 
<br/><br/><label>Source: </label> 147, 01/10/2013, Classic Book Service  Textual 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic Science
<br/><br/><label>Dewey Class. No.: </label>D65152, Q3