TY  - BOOK
AU  - Solgaard Olav
TI  - Photonic microsystems :  Micro and nanotechnology applied to optical devices and systems.     
T2  - MEMS reference shelf
U1  - D65152, P9 
PY  - 2009///
CY  - New York  
PB  -  Springer      
KW  - Nanotechnology-Electronics
ER  -