Brodie Ivor <br/><br/>
Physics of microfabrication. 
Brodie Ivor; Muray Julius J 
 -  1982 
<br/><br/><label>Standard No.: </label>17580 
<br/><br/><label>Source: </label> Textual 
<br/><br/><label>Dewey Class. No.: </label>D6515, M2