Jackson Kenneth A Ed. <br/><br/>
Handbook of semiconductor technology 
Jackson Kenneth A Ed.; Schroter Wolfgang Ed. 
 - Weinheim  Wiley-VCH           2000 
 - p.  cm. 
<br/><br/> Includes bibliographical references 
<br/><br/><label>ISBN: </label>3527298355(V2) (hbd) 3527298347(V1) (hbd) 
<br/><br/><label>Standard No.: </label>7287 
<br/><br/><label>Source: </label> Ashutosh,  Reference Collections 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Semiconductor processing<br/> Semiconductor processing<br/>Physics
<br/><br/><label>Dewey Class. No.: </label>C6:212:(F)g, P0.1-.2    RR