TY  - BOOK
AU  - Jackson Kenneth A Ed.
AU  -  Schroter Wolfgang Ed.
TI  - Handbook of semiconductor technology
SN  -  3527298355(V2) (hbd)
U1  - C6:212:(F)g, P0.1-.2    RR 
PY  - 2000///
CY  - Weinheim
PB  - Wiley-VCH         
KW  -  Semiconductor processing
KW  - Physics
N1  - Includes bibliographical references
ER  -