000 00559nam a2200193Ia 4500
005 20260119144212.0
008 008 260114s9999 xx 000 0 eng d
020 _a9780323996020
037 _aEBOOK
040 _aCRL
_beng
_cCRL
041 _aeng
_2eng
084 _qCRL
100 _aShenglin Ma
_9902820
245 0 _aTSV 3D RF Integration: High Resistivity Si Interposer Technology
260 _aElsevier
_bElsevier
_c2022
856 _uhttps://www.sciencedirect.com/science/book/9780323996020
942 _cEBOOK
999 _c1494911
_d1494911