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| 005 | 20260119144241.0 | ||
| 008 | 008 260114s9999 xx 000 0 eng d | ||
| 020 | _a9780323510844 | ||
| 037 | _aEBOOK | ||
| 040 |
_aCRL _beng _cCRL |
||
| 041 |
_aeng _2eng |
||
| 084 | _qCRL | ||
| 100 |
_aReinhardt, Karen _9903393 |
||
| 245 | 0 | _aHandbook of Silicon Wafer Cleaning Technology | |
| 260 |
_aWilliam Andrew Publishing _bElsevier _c2018 |
||
| 856 | _uhttps://www.sciencedirect.com/science/book/9780323510844 | ||
| 942 | _cEBOOK | ||
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_c1495485 _d1495485 |
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