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| 005 | 20260119144300.0 | ||
| 008 | 008 260114s9999 xx 000 0 eng d | ||
| 020 | _a9780128217917 | ||
| 037 | _aEBOOK | ||
| 040 |
_aCRL _beng _cCRL |
||
| 041 |
_aeng _2eng |
||
| 084 | _qCRL | ||
| 100 |
_aBabu Suryadevara _9903772 |
||
| 245 | 0 | _aAdvances in Chemical Mechanical Planarization (CMP),2e | |
| 260 |
_aWoodhead Publishing _bElsevier _c2021 |
||
| 856 | _uhttps://www.sciencedirect.com/science/book/9780128217917 | ||
| 942 | _cEBOOK | ||
| 999 |
_c1495864 _d1495864 |
||