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| 020 | _a9781383029048 | ||
| 037 | _aEBOOK | ||
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_aCRL _beng _cCRL |
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| 084 | _qCRL | ||
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_aSugawara _9936885 |
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| 245 | 0 | _aPlasma Etching Fundamentals and Applications | |
| 260 |
_bOxford University PressOxford University Press _c2023 |
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| 856 | _uhttps://academic.oup.com/book/54731 | ||
| 942 | _cEBOOK | ||
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