000 00678nam a2200241Ia 4500
005 20260121112125.0
008 3494 260114s9999 xx 000 0 eng d
020 _a9781786347169
037 _aEBOOK
040 _aCRL
_beng
_cCRL
041 _aeng
_2eng
084 _qCRL
100 _aVelichko Oleg
_9952611
245 0 _aCoupled Diffusion of Impurity Atoms and Point Defects in Silicon Crystals
260 _bWorld Scientific
260 _bWSPC EUROPE
260 _c2019
650 _aMaterials Science
_9952612
856 _uhttps://www.worldscientific.com/worldscibooks/10.1142/Q0212#t=toc
942 _cEBOOK
999 _c1540794
_d1540794