000 00694nam a2200241Ia 4500
005 20260121112225.0
008 4281 260114s9999 xx 000 0 eng d
020 _a9789813222168
037 _aEBOOK
040 _aCRL
_beng
_cCRL
041 _aeng
_2eng
084 _qCRL
100 _aLau Wai Shnig
_9954185
245 0 _aUlsi Front-End Technology: Covering from the First Semiconductor Paper to Cmos Finfet Technology
260 _bWorld Scientific
260 _bWSPC
260 _c2017
650 _aMaterials Science
_9954186
856 _uhttps://www.worldscientific.com/worldscibooks/10.1142/10495#t=toc
942 _cEBOOK
999 _c1541581
_d1541581