000 00682nam a2200241Ia 4500
005 20260121112605.0
008 7213 260114s9999 xx 000 0 eng d
020 _a9781860948633
037 _aEBOOK
040 _aCRL
_beng
_cCRL
041 _aeng
_2eng
084 _qCRL
100 _aFrangi Attilio Et Al
_9960049
245 0 _aAdvances in Multiphysics Simulation and Experimental Testing of Mems
260 _bICP
260 _bWorld Scientific
260 _c2008
650 _aNanotechnology & Nanoscience
_9960050
856 _uhttps://www.worldscientific.com/worldscibooks/10.1142/p522#t=toc
942 _cEBOOK
999 _c1544513
_d1544513